Gas stick assemblies
AGL series general gas stick assemblies
Gas stick assemblies are used for precise pressure control and fluid shutoff in general gas systems and oxygen-enriched environments. AGL series are integrated from a ball valve, a regulator and a pressure gauge for easy site installation. FITOK has been adopting strict specifications for materials, cleaning and packaging processes to ensure product cleanliness meets ASTM G93, Level C requirements.
Features gas stick
Excellent sensitivity and set point pressure stability
Sizes from 1/4″ to 1″ optional
Alloy diaphragm improves strength and corrosion resistance for long cycle life.
FC-02 Special Cleaning and Packaging Process Specification
• Meet the requirements of ASTM G93 Level C specifying nonvolatile residues shall not exceed 6 mg/ft applicable for oxygen-enriched environments
• Double bagged with vacuum sealed polyethylene dust-free inner bag (inert gas filling optional) and sealed polyethylene outer bag
AGH Series high purity gas stick
Gas stick assemblies are applicable for high purity gas systems in the semiconductor industry and others.
AGH series integrate a diaphragm valve, a regulator and a pressure gauge into one stick to reduce site connections. FITOK has been adopting strict specifications for materials, welding and cleaning processes to ensure products meet the ultra-clean and high-performance requirements of the semiconductor manufacturing industry.
Features gas stick.
Ultra-high purity diaphragm valve for shut-off function.
With ultra-high purity pressure gauge and regulator
Sizes from 1/4″ to 1″ optional
Alloy diaphragm improves strength and corrosion resistance for long cycle life.
T series tubular fittings optional for pressure gauge connection (customized lengths available)
FC-03 Ultra High Purity Process Specification
• Assembled and tested in ISO 4/FED-STD-209E Class 10 Cleanroom
• Manufactured from high purity stainless steel complying with SEMI F20 standard, wetted surfaces electropolished to an average internal surface roughness Ra of 10 µin. (0.25 µm)
• Ultra high purity cleaning with continuously monitored DI water ultrasonic cleaning system
• Double bagged with vacuum sealed polyethylene dust-free inner bag (inert gas filling optional) and sealed polyethylene outer bag
