Filtration Definitions

High purity filters are specifically designed to remove fine impurities from fluids in environments that demand exceptionally high cleanliness standards, such as semiconductor manufacturing. FITOK maintains strict control over material selection and manufacturing processes to meet these rigorous cleanliness requirements. In addition,these filters can operate at high flow rates, ensuring fluid purity and quality.

FP Series Ultra High Purity Filters feature a removal rating of 0.003 μm. Designed with a PTFE filter element, these filters offer excellent chemical compatibility, making them ideal for use in various semiconductor manufacturing processes, for example, filtering process gases, purge gases, and shielding gases in manufacturing processes such as CVD, PVD, and dry etching.